Imprint pattern forming method

ABSTRACT

An imprint pattern forming method includes contacting a template with a pattern in a front surface with an imprint material formed in a substrate to fill the imprint material into the pattern, curing the imprint material filled in the pattern to form an imprint material pattern, and after forming the imprint material pattern, separating the template from the imprint material pattern while applying pressure to the back surface of the template.

CROSS-REFERENCE TO RELATED APPLICATIONS

Notice: More than one reissue application has been filed for the reissueof U.S. Pat. No. 8,444,889. The reissue applications are Reissueapplication Ser. No. 14/717,980 (issued as Reissue Pat. No. RE46,191 onNov. 1, 2016), and the present application filed herewith.

This application is a continuation reissue application of U.S. patentapplication Ser. No. 14/717,980 (issued as Reissue Pat. No. RE46,191 onNov. 1, 2016), filed May 20, 2015, which is a reissue application ofU.S. Pat. No. 8,444,889, issued on May 21, 2013, from U.S. patentapplication Ser. No. 12/726,503, which is based upon and claims thebenefit of priority from prior Japanese Patent Application No.2009-073897 2009-0738897, filed Mar. 25, 2009, the. This application isalso a reissue application of U.S. Pat. No. 8,444,889. The entirecontents of which the above-identified applications are incorporatedherein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an imprint pattern forming method.

2. Description of the Related Art

In recent years, much effort has been made to develop a micromachiningtechnique called nano imprinting.

In a pattern forming method using the nanoimprinting, first, a templatein which a pattern to be transferred is formed is contacted with aphotocurable organic material (resist) coated on a substrate. Then, theresist is irradiated with light and thus cured. The template is thenseparated from the resist to form a resist pattern (see, for example,Jpn. Pat. Appln. KOKAI Publication Nos. 2001-68411 and 2000-194142).

However, in the step of separating the template from the resist, part ofthe resist is disadvantageously likely to be pulled out by the templatedepending on a density distribution of the pattern, resulting in adefect. Thus, the pattern forming method does not always allow patternsto be properly formed.

BRIEF SUMMARY OF THE INVENTION

According to an aspect of the present invention, there is provided animprint pattern forming method comprising: contacting a template with apattern in a front surface with an imprint material formed in asubstrate to fill the imprint material into the pattern; curing theimprint material filled in the pattern to form an imprint materialpattern; and after forming the imprint material pattern, separating thetemplate from the imprint material pattern while applying pressure tothe back surface of the template.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

FIG. 1 is a sectional view schematically showing a part of an imprintmethod according to an embodiment of the present invention;

FIG. 2 is a sectional view schematically showing a part of the imprintmethod according to the embodiment of the present invention;

FIG. 3 is a sectional view schematically showing a part of the imprintmethod according to the embodiment of the present invention;

FIG. 4 is a sectional view schematically showing a part of the imprintmethod according to the embodiment of the present invention;

FIG. 5 is a sectional view schematically showing a part of an imprintmethod according to a comparative example of the embodiment of thepresent invention;

FIG. 6 is a sectional view schematically showing a part of the imprintmethod according to the comparative example of the embodiment of thepresent invention;

FIG. 7 is a sectional view schematically showing a part of the imprintmethod according to the comparative example of the embodiment of thepresent invention;

FIG. 8 is a sectional view schematically showing a part of the imprintmethod according to the comparative example of the embodiment of thepresent invention;

FIG. 9 is a sectional view schematically showing a part of the imprintmethod according to the embodiment of the present invention;

FIG. 10 is a sectional view schematically showing a part of the imprintmethod according to the embodiment of the present invention;

FIG. 11 is a sectional view schematically showing a part of the imprintmethod according to the embodiment of the present invention;

FIG. 12 is a sectional view schematically showing a part of the imprintmethod according to the embodiment of the present invention;

FIG. 13 is a sectional view schematically showing a part of the imprintmethod according to the embodiment of the present invention;

FIG. 14A is a diagram showing the relationship between a load and timein the steps shown in FIGS. 5 to 8, and FIG. 14B is a diagram showingthe relationship between a load and time in the steps shown in FIGS. 9to 13;

FIG. 15 is a sectional view schematically showing a part of an imprintmethod according to a modification 1 of the embodiment of the presentinvention;

FIG. 16 is a sectional view schematically showing a part of the imprintmethod according to the modification 1 of the embodiment of the presentinvention;

FIG. 17 is a sectional view schematically showing a part of the imprintmethod according to the modification 1 of the embodiment of the presentinvention;

FIG. 18 is a sectional view schematically showing a part of the imprintmethod according to the modification 1 of the embodiment of the presentinvention;

FIG. 19 is a sectional view schematically showing a part of the imprintmethod according to the modification 1 of the embodiment of the presentinvention; and

FIG. 20A is a diagram showing the relationship between a separationspeed and time in the steps shown in FIGS. 5 to 8, and FIG. 20B is adiagram showing the relationship between a separation speed and time inthe steps shown in FIGS. 15 to 19.

DETAILED DESCRIPTION OF THE INVENTION

An embodiment of the present invention will be descried below withreference to the drawings.

(Embodiment)

FIGS. 1, 2, 3 and 4 are sectional views schematically showing a basicimprint method according to the present invention.

As shown in FIG. 1, an appropriate amount of photocurable organicmaterial (resist) 101 as a pattern forming material (imprint material)is dropped onto a processing target surface of a substrate 100 accordingto an inkjet scheme. In FIG. 1, the resist 101 is scattered on theprocessing target surface of the substrate 100 at a plurality of points.However, the resist 101 may be formed into a pattern forming materiallayer in a given area. A template 102 includes a pattern formed in afront surface and is held on the front surface of a template holdingsection 103. Furthermore, the back surface of the template 102 and thefront surface of the template holding section 103 form a space 104. Theback surface side of the template holding section 103 connects to amoving mechanism (not shown in the drawings) configured to move thetemplate 102 and the template holding section 103 via a load measuringsection (not shown in the drawings). The load measuring section is, forexample, a spring balance including a pressure sensor. The loadmeasuring section is used to measure a load imposed on the template 102.Additionally, the template holding section 103 comprises an inlet 105through which for example, gas is introduced into or discharged from thespace 104. The template 102 is made of, for example, glass. The area inwhich the pattern is formed is substantially flat.

First, for example, gas is introduced into the space 104. Thus, pressureis applied to the back surface of the template 102 to bend the template102 such that the template 102 protrudes toward the front surface.

Then, as shown in FIG. 2, the template 102 and the substrate 100 areassigned with each other. With the gas held in the space 104, the plate102 is lowered vertically to bring the template 102 into contact withthe resist 101. The resist 101 is then filled into the pattern (recesspattern) in the template 102.

Then, as shown in FIG. 3, when the resist 101 is filled into the patternin the template 102, the gas in the space 104 is discharged to reducethe pressure in the space 104. When a pattern formation area in thetemplate 102 is substantially flattened, the resist 101 is irradiatedwith ultraviolet rays from above the template holding section 103 inorder to be sufficiently cured. Thus, a resist pattern (imprint materialpattern) is formed on the photocurable organic material 101.

As shown in FIG. 4, gas is introduced into the space 104. As describedbelow, the template 102 is lifted vertically and separated from theresist 101. Thus, the pattern shape formed in the template 102 istransferred to the resist 101.

A separation method shown in FIG. 4 will be described in detail withreference to FIGS. 5, 6, 7, 8, 9, 10, 11, 12, 13, 14A and 14B.

FIGS. 5, 6, 7 and 8 are sectional views showing a part of the separationmethod according to a comparative example of the present embodiment.FIGS. 9, 10, 11, 12 and 13 are sectional views showing a part of theseparation method according to the present embodiment. FIG. 14A is agraph showing the relationship between a load and time in steps shown inFIGS. 5, 6, 7 and 8. FIG. 14B is a graph showing the relationshipbetween a load and time in steps shown in FIGS. 9, 10, 11, 12 and 13.

As shown in FIG. 5, the template 102 comprises an area A in which adense pattern is formed, an area C in which a coarse pattern is formed,an area E in which a dense pattern is formed, an area B corresponding tothe boundary between areas A and C, and an area D corresponding to theboundary between areas C and E. Furthermore, the template 102 and theresist 101 are in close contact with each other. The adhesion increasesconsistently with the size of the area in which the template 102 and theresist 101 are in contact with each other. That is, the adhesionincreases consistently with the density of the pattern.

Then, when the template 102 is lifted vertically by a given force, thelifting generally starts from the periphery (end) of the template.Hence, the separation starts from the end and progresses from the endtoward a central portion. Thus, as shown in FIG. 6, when liftedvertically by the given force, the separation progresses from area A,located at the end, toward area E, located in the central portion. Inarea A, the dense pattern is formed, and thus a heavy load is imposed onthe template 102. Thus, the speed (hereinafter referred to as theseparation speed) at which the template 102 is separated from the resist101 is low. Here, the load imposed on the template 102 corresponds tothe force with which the template is pulled by the resist. In otherwords, the load corresponds to the force required to separate thetemplate from the resist.

Then, as shown in FIGS. 7 and 14A, the adhesion decreases as theseparating of template 102 from the resist 101 progresses to area A andarea B, located near area C. Thus, the load imposed on the template 102is rapidly reduced to rapidly increase the separation speed near area B.The separation speed refers to the speed at which the template isseparated from the resist. As a result, a part of the resist 101 formednear area B is stripped by the template 102, resulting in a defect inthe pattern.

Furthermore, as shown in FIGS. 8 and 14A, in area C, the separationspeed is high. Thus, area D is separated at the high separation speed.Consequently, a part of the resist 101 formed near area D is stripped bythe template 102, resulting in a defect in the pattern. In area E, thedense pattern with the strong adhesion is formed. This serves toincrease the load imposed on the template 102, while reducing theseparation speed. Hence, a normal pattern is formed on a part of theresist 101 formed near area E.

As described above, in a part of the resist 101 formed near the boundarybetween the dense pattern and the coarse pattern, a rapid change in theload imposed on the template 102 may result in a defect in the pattern.In other words, a rapid change in the adhesion between the template 102and the resist 101 may result in a defect in the pattern.

Now, a part of the separation method according to the present embodimentwill be described.

First, as shown in FIG. 9, the template 102 ad the resist 101 are inclose contact with each other.

Then, as shown in FIG. 10, when lifted vertically by the given force,the template 102 is separated from the resist 101 starting from area A,located at the end. In area A, the dense pattern is formed. Thus, aheavy load is imposed on the template 102, and the separation speed islow. As a result, area A is separated normally.

Then, as shown in FIG. 11, the adhesion decreases as the separating ofthe template 102 progresses to area A and area B, located near area C.Thus, the load imposed on the template 102 is rapidly reduced to rapidlyincrease the separation speed near area B. In this case, a lower loadthreshold and a higher load threshold are set in, for example, a controlsection (not shown in the drawings) connected to the load measuringsection configured to measure the load imposed on the template 102.Then, when the load imposed on the template 102 reaches the lower loadthreshold, for example, gas is introduced into the space 104, that is,the back surface side of the template 102, to apply pressure to the backsurface of the template 102. This increases the load imposed on thetemplate 102, while reducing the separation speed. Thus, as shown inFIG. 14B, a rapid decrease in load during the separation of area B canbe suppressed.

Then, as shown in FIG. 12, when area C, in which the coarse pattern isformed, is separated, the template 102 is separated from the resist 101with pressure continuously applied to the back surface of the template102 to keep the template 102 bent.

Then, as shown in FIG. 13, when area D, where the coarse pattern shiftsto the dense pattern, the template 102 is separated from the resist 101with pressure applied to the back surface of the template 102 to keepthe template 102 bent. Then, when area E, in which the dense pattern isformed, is separated, if the load imposed on the template 102 reachesthe higher load threshold, the gas in the space 104 is discharged toreduce the pressure applied to the template 102.

That is, a possible defect in the pattern can be inhibited by performingcontrol such that the load imposed on the template 102 or the changerate of the load is constant as shown in FIG. 14B. Thus, when theadhesion between the template 102 and the resist 101 varies rapidly, gasis introduced into the space 104 in order to keep the load imposed onthe template 102 or the change rate of the load constant.

According to the above-described embodiment, the template holdingsection 103 comprises the load measuring section configured to measurethe load imposed on the template 102 and the inlet 105 configured tointroduce or discharge the gas into or from the space 104. When thetemplate 102 is separating from the resist 101, the load imposed on thetemplate 102 is measured using the load measuring section so that thegas can be introduced into or discharged from the back surface side ofthe template 102 through the inlet 105 depending on a change in load.Application of pressure to the back surface of the template allows theload imposed on the template 102 or the change rate of the load to bekept constant. This enables inhibition of a possible defect in theresist 101 caused by a rapid change in load.

(Modification 1)

In the above-described embodiment, the template holding section 103comprises the load measuring section configured to measure the loadimposed on the template 102. When the template 102 is separated, theload measuring section is used to measure the load imposed on thetemplate 102 in order to allow determination of whether to introduce ordischarge the gas into or from the space 104. In Modification 1, amethod will be described which allows determination of whether tointroduce or discharge the gas into or from the space 104 based on theseparation speed of the template 102. The process through the step offilling the resist 101 into the pattern in the template 102 is similarto that in the above-described embodiment and thus will not bedescribed.

The separation method shown in FIG. 4 will be described in detail withreference to FIGS. 15, 16, 17, 18, 19, 20A and 20B.

FIGS. 15, 16, 17, 18 and 19 are sectional views showing a part of theseparation methods according to the present modification. Furthermore,FIG. 20A is a graph showing the relationship between the separationspeed and time in the steps shown in FIGS. 5, 6, 7 and 8. FIG. 20B is agraph showing the relationship between the separation speed and time inthe steps shown in FIGS. 15, 16, 17, 18 and 19.

As shown in FIG. 14A for the comparative example of thealready-described embodiment, the load imposed on the template 102decreases rapidly as the separation shifts from the dense pattern to thecoarse pattern. Hence, as shown in FIG. 20A, the separation speed of thetemplate 102 increases rapidly when the separation shifts from the densepattern to the coarse pattern. Thus, in the present modification, theseparation speed of the template 102 is controlled as described below.

Now, a part of the separation method according to the presentmodification will be described.

First, as shown in FIG. 15, the template 102 and the resist 101 are inclose contact with each other. In the present modification, as shown byarrows, for example, the ends of the template 102 and the substrate 100are irradiated with laser beams to measure the speed at which thetemplate 102 is separated from the substrate.

Then, as shown in FIG. 16, when lifted by the given force, the template102 is separated from the resist 101 starting from area A, whichcorresponds to the end. In area A, the dense pattern is formed. Thus, aheavy load is imposed on the template 102, and the separation speed ofthe template 102 is low. As a result, area A is separated normally.

Then, as shown in FIG. 17, the adhesion decreases as the separating ofthe template 102 progresses to area A and area B, located near area C.Thus, the load imposed on the template 102 is rapidly reduced to rapidlyincrease the separation speed near area B. In this case, a lower speedthreshold and a higher speed threshold are set in, for example, ameasuring section (not shown in the drawings) configured to measure thespeed of the template 102. Then, when the speed of the template 102reaches the higher speed threshold, for example, gas is introduced intothe space 104, that is, the back surface side of the template 102, toapply pressure to the back surface of the template 102. This increasesthe separation speed of the template 102. Thus, as shown in FIG. 20B, arapid increase in the separation speed of the template 102 during theseparation of area B can be suppressed.

Then, as shown in FIG. 18, when area C, in which the coarse pattern isformed, is separated, the template 102 is separated from the resist 101with pressure continuously applied to the back surface of the template102 to keep the template 102 bent.

Then, as shown in FIG. 19, even when area D, where the coarse patternchanges to the dense pattern, is separated, pressure is continuouslyapplied to the back surface of the template 102 to keep the template 102bent. Then, if in area E, in which the dense pattern is formed, theseparation speed reaches the lower speed threshold, the gas in the space104 is discharged to reduce the pressure applied to the template 102.

That is, as shown in FIG. 20B, a possible defect in the pattern can beinhibited by controllably keeping the speed of the template 102 or thechange rate of the speed constant. Thus, if the separation speed of thetemplate 102 increases, gas is introduced into the space 104 to keep thespeed of the template 102 or the change rate of the speed constant.

According to modification 1 described above, the separation speed of thetemplate 102 is measured. When the template 102 is separated from theresist 101, the separation speed of the template 102 is measured so thatthe gas is introduced into or discharged from the back surface side ofthe template 102 through the inlet 105 depending on a change in speed.Application of pressure to the back surface side of the template 102allows the speed of the template 102 or the change rate of the change tobe kept constant. This enables inhibition of a possible defect in theresist 101 caused by a rapid change in load.

(Modification 2)

In Modification 1 of the above-described embodiment, the separationspeed of the template 102 is measured using laser beams. The separationspeed of the template 102 is measured to allow determination of whetherto introduce or discharge the gas into or from the space 104. InModification 2, a method of measuring the separation speed by observingthe separation state of the template 102 with a CCD or the like will bedescribed. The process through the step of filling the resist 101 intothe pattern in the template 102 is similar to that in theabove-described embodiment and thus will not be described.

When the template 102 is made of glass and the resist 101 is alsocolorless and transparent, if the resist 101 is filled into the patternin the template 102, the resist 101 is assimilated with the template102.

However, when the template 102 is separated, the observed state of thearea from which the resist 101 has been separated is different from thatof the area from which the resist 101 has not been separated. Asdescribed above, the separation of the template generally progressesfrom the end to the central portion. Thus, the observed separation stateof the template 102 appears like a ring-like pattern (annular pattern).The separation speed of the template 102 can be measured by, forexample, observing this pattern with a CCD (not shown in the drawings)installed above the template holding section 103 to measure the speed atwhich the size of the annular pattern decreases.

According to Modification 2 described above, as is the case withModification 1 described above, the separation speed of the template 102is measured by observing the released resist 101 from above the template102 with a CCD or the like. That is, when the template 102 is separatedfrom the resist 101, the separation speed of the template 102 ismeasured so that the gas is introduced into or discharged from the backsurface side of the template 102 through the inlet 105 depending on achange in speed. Application of pressure to the back surface side of thetemplate 102 allows the speed of the template 102 or the change rate ofthe change to be kept constant. This enables inhibition of a possibledefect in the resist 101 caused by a rapid change in load.

(Modification 3)

In the embodiment and Modifications 1 and 2 described above, the loadimposed on the template 102 or the separation speed of the template 102is measured. Then, when the template 102 is separated, the load imposedon the template 102 or the separation speed of the template 102 ismeasured to allow determination of whether to introduce or discharge thegas into or from the space 104. In Modification 3, a method will bedescribed which allows determination of whether to introduce ordischarge the gas into or from the space 104 based on design data on thetemplate 102 including CAD design pattern information on the patternformed in the template 102. The process through the step of filling theresist 101 into the pattern in the template 102 is similar to that inthe above-described embodiment and thus will not be described.

First, the design data on the template 102 is used to simulate theseparation between the template 102 and the resist 101. As a result,timings for introducing and discharging gas into or from the space 104are calculated depending on a density distribution of the pattern.Imprinting is performed based on the calculated timings. For example, itis assumed that a template including an outer area with a high patterndensity and an adjacent inner area with a low pattern density isseparated from the resist. Then, a high pressure may be applied to theback surface of the template when the area with the low pattern densityis separated compared to when the area with the high pattern density isseparated. In contrast, it is assumed that a template including an outerarea with a low pattern density and an adjacent inner area with a highpattern density is separated from the resist. Then, a low pressure maybe applied to the back surface of the template when the area with thehigh pattern density is separated compared to when the area with the lowpattern density is separated.

In Modification 3 described above, the design data on the template 102is used to perform pre-simulation to calculate the timings forintroducing and discharging the gas for the template 102. When thetemplate 102 is separated from the resist 101, the gas is introducedinto or discharged from the back surface side of the template 102through the inlet 105 in accordance with the calculated timings. Thisenables inhibition of a possible defect in the resist 101, as is thecase with the embodiment and modifications 1 and 2 described above.

(Modification 4)

In Modification 3 described above, whether to introduce or discharge thegas into or from the space 104 is determined based on the design data onthe template 102. In Modification 4, a method will be described whichallows determination of whether to introduce or discharge the gas intoor from the space 104, by observing the separation state of the template102 with a CCD or the like and referencing the design data on thetemplate 102. The process through the step of filling the resist 101into the pattern in the template 102 is similar to that in theabove-described embodiment and thus will not be described.

As described above, when the template 102 is separated from the resist101, the separated area (or non-separated area) can be determined usinga CCD. Thus, the timings for introducing and discharging the gasdepending on the density of the pattern can be calculated by observingthe separated area (or non-separated area) with a CCD and referencingthe design data on the template 102. Imprinting is performed based onthe calculated timings.

In Modification 4 described above, the gas is introduced into ordischarged from the back surface side of the template 102 based on theseparation state of the resist 101 and the design data on the template102. This enables inhibition of a possible defect in the resist 101, asis the case with the embodiment and modifications 1, 2, and 3 describedabove.

In the above-described embodiment and modifications, the gas is used topressurize the back surface of the template 102. However, any method ofapplying pressure to the back surface to the template 102 enables theeffects of above-described embodiment and modifications to be exerted.Specifically, a piezoelectric element may be used or a liquid may beintroduced into the space 104, to apply pressure to the back surface ofthe template 102.

Furthermore, in the above-described embodiment and modifications,pressure control involving a pressurization timing, a pressure reductiontiming, and the like is preformed during a single separation operation(one shot). However, it is possible to exert a given pressure during theperiod of one shot instead of performing the pressure control. Even inthis case, a rapid change in load or speed can be suppressed to somedegree. Furthermore, during the separation, the template can beinhibited from being rolled back and can be separated from the substratewhile remaining parallel to the substrate. This enables a possibledefect in the resist 101 to be prevented.

Additionally, in the above-described embodiment and modifications,pressure is exerted on the back surface of the template 102 to controlthe load imposed on the template 102 or the speed of the template 102.However, a force required to lift the template 102 may further beadjusted.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details and representative embodiments shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventiveconcept as defined by the appended claims and their equivalents.

What is claimed is:
 1. An imprint pattern forming method comprising:contacting a template with a pattern in a front surface with an imprintmaterial formed in a substrate to fill the imprint material into thepattern, wherein the template protrudes toward the front surface whenapplying pressure to a back surface of the template; curing the imprintmaterial filled in the pattern to form an imprint material pattern;after forming the imprint material pattern, separating the template fromthe imprint material pattern while applying pressure to the back surfaceof the template, wherein while the template is being separated from theimprint material pattern, the substrate does not protrude and only thetemplate protrudes; and determining a timing for applying the pressureto the back surface of the template, by performing a simulation of aseparation between the template and the imprint material, with a designdata of the template, wherein the applying the pressure to the backsurface of the template is based on the timing, and wherein while thetemplate is being separated from the imprint material pattern, thepressure applied to the back surface of the template is changed.
 2. Animprint pattern forming method comprising: contacting a template with apattern in a front surface with an imprint material formed in asubstrate to fill the imprint material into the pattern, wherein thetemplate protrudes toward the front surface when applying pressure to aback surface of the template; curing the imprint material filled in thepattern to form an imprint material pattern; after forming the imprintmaterial pattern, separating the template from the imprint materialpattern while applying pressure to the back surface of the template,wherein while the template is being separated from the imprint materialpattern, the substrate does not protrude and only the templateprotrudes; while the template is being separated from the imprintmaterial pattern, observing a separated area or a non-separated area;and determining a timing for applying the pressure to the back surfaceof the template based on a result of the observation and a design dataof the template, wherein the applying the pressure to the back surfaceof the template is based on the timing, and wherein while the templateis being separated from the imprint material pattern, the pressureapplied to the back surface of the template is changed.
 3. The methodaccording to claim 1, wherein while the template is being separated fromthe imprint material pattern, the pressure applied to the back surfaceof the template is changed depending on a force required to separate thetemplate.
 4. The method according to claim 3, wherein the pressureapplied to the back surface of the template is increased when the forcehas at most a first value and is reduced when the force has at least asecond value.
 5. The method according to claim 3, wherein the pressureis applied using gas.
 6. The method according to claim 3, wherein theforce is measured by a measuring section connected to the back surfaceof the template.
 7. The method according to claim 1, wherein while thetemplate is being separated from the imprint material pattern, thepressure applied to the back surface of the template is changeddepending on a separation speed of the template.
 8. The method accordingto claim 7, wherein the pressure applied to the back surface of thetemplate is increased when the separation speed has at least a thirdvalue and is reduced when the force has at most a fourth value.
 9. Themethod according to claim 7, wherein the pressure is applied using gas.10. The method according to claim 7, wherein the separation speed ismeasured by irradiating the template and the substrate with a laserbeam.
 11. The method according to claim 1, wherein the applying thepressure to the back surface of the template includes applying a higherpressure when an area of low pattern density is separated and applying alower pressure when an area of higher density is separated.
 12. Themethod according to claim 11, wherein the pressure applied to the backsurface of the template is increased when the density has at most afirst value and is reduced when the density has at least a second value.13. The method according to claim 1, wherein the pressure is appliedusing gas.
 14. An imprint pattern forming method comprising: contactinga template with a pattern in a front surface with an imprint materialformed in a substrate to fill the imprint material into the pattern;curing the imprint material filled in the pattern; separating thetemplate from an imprint material pattern while applying pressure to aback surface of the template; and determining a timing for applying thepressure to the back surface of the template based on information thatreflects a progress of the separation, wherein the applying the pressureto the back surface of the template is based on the timing, and whereinwhile the template is being separated from the imprint material pattern,the pressure applied to the back surface of the template is changed. 15.The method according to claim 14, wherein while the template is beingseparated from the imprint material pattern, the pressure applied to theback surface of the template is changed depending on a force required toseparate the template.
 16. The method according to claim 15, wherein thepressure applied to the back surface of the template is increased whenthe force is below or is equal to a first value and is reduced when theforce exceeds or equals to a second value.
 17. The method according toclaim 15, wherein the force is measured by a measuring section connectedto the back surface of the template.
 18. The method according to claim14, wherein while the template is being separated from the imprintmaterial pattern, the pressure applied to the back surface of thetemplate is changed depending on a separation speed of the template. 19.The method according to claim 18, wherein the pressure applied to theback surface of the template is increased when the separation speedexceeds or equals to a first value and is reduced when the force isbelow or equal to a second value.
 20. The method according to claim 18,wherein the separation speed is measured by irradiating the template andthe substrate with a laser beam.
 21. The method according to claim 14,wherein the applying the pressure to the back surface of the templateincludes applying a higher pressure when an area of low pattern densityis separated and applying a lower pressure when an area of higherdensity is separated.
 22. The method according to claim 21, wherein thepressure applied to the back surface of the template is increased whenthe density has at most a first value and is reduced when the densityhas at least a second value.
 23. The method according to claim 14,wherein the information that reflects a progress of the separationincludes a measurement of a size of the separated area or a size of thenon-separated area.
 24. The method according to claim 23, wherein thepressure is determined based on a speed of change in the measured sizesof the separated area or the non-separated area.
 25. The methodaccording to claim 14, wherein the imprint material is assimilated withthe template when the imprint material is filled into the pattern. 26.The method according to claim 14, wherein the pressure is applied usinga piezoelectric element.
 27. The method according to claim 14, whereinthe pressure is applied using liquid.
 28. The method according to claim14, wherein the pressure is applied using gas.
 29. The method accordingto claim 14, wherein the template protrudes toward the front surfacewhen applying pressure to a back surface of the template.
 30. The methodaccording to claim 14, wherein while the template is being separatedfrom the imprint material pattern, the substrate does not protrude andonly the template protrudes.
 31. The method according to claim 14,wherein while the template is being separated from the imprint material,the template is partially separated from the imprint material.
 32. Animprint pattern forming method comprising: contacting a template with apattern in a front surface with an imprint material formed in asubstrate to fill the imprint material into the pattern; curing theimprint material filled in the pattern; separating the template from animprint material pattern while applying pressure to a back surface ofthe template; and determining a timing for applying the pressure to theback surface of the template based on a result of an observation of theimprint material in a separated area, wherein the applying the pressureto the back surface of the template is based on the timing, and whereinwhile the template is being separated from the imprint material pattern,the pressure applied to the back surface of the template is changed. 33.The method according to claim 32, wherein the applying the pressure tothe back surface of the template includes applying a higher pressurewhen an area of low pattern density is separated and applying a lowerpressure when an area of higher density is separated.
 34. The methodaccording to claim 33, wherein the pressure applied to the back surfaceof the template is increased when the density has at most a first valueand is reduced when the density has at least a second value.
 35. Themethod according to claim 32, wherein the template protrudes toward thefront surface when applying pressure to a back surface of the template.36. The method according to claim 32, wherein while the template isbeing separated from the imprint material pattern, the substrate doesnot protrude and only the template protrudes.
 37. The method accordingto claim 32, wherein the pressure is applied using gas.
 38. The methodaccording to claim 32, wherein while the template is being separatedfrom the imprint material, the template is partially separated from theimprint material.
 39. An imprint pattern forming method comprising:contacting a template with a pattern in a front surface with an imprintmaterial formed in a substrate to fill the imprint material into thepattern; curing the imprint material filled in the pattern; separatingthe template from an imprint material pattern while applying pressure tothe back surface of the template; and changing the pressure applied tothe back surface of the template based on a timing for applying thepressure to the back surface of the template while the template is beingseparated from the imprint material pattern, the timing for applying thepressure to the back surface of the template being determined based on adensity distribution of the pattern.
 40. The method according to claim39, further comprising determining a timing for applying the pressure tothe back surface of the template.
 41. The method according to claim 39,the timing for applying the pressure to the back surface of the templateis determined based on a result of an observation of the imprintmaterial.
 42. The method according to claim 39, wherein the applying thepressure to the back surface of the template includes applying a higherpressure when an area of low pattern density is separated and applying alower pressure when an area of higher density is separated.
 43. Themethod according to claim 42, wherein the pressure applied to the backsurface of the template is increased when the density has at most afirst value and is reduced when the density has at least a second value.44. The method according to claim 39, wherein the pressure is appliedusing gas.
 45. The method according to claim 39, wherein while thetemplate is being separated from the imprint material, the template ispartially separated from the imprint material.
 46. The method accordingto claim 39, wherein while the template is being separated from theimprint material, the pressure applied to the back surface of thetemplate is changed depending on a force required to separate thetemplate.
 47. The method according to claim 46, wherein the pressureapplied to the back surface of the template is increased when the forceis below or is equal to a first value and is reduced when the forceexceeds or equals to a second value.
 48. The method according to claim46, wherein the force is measured by a measuring section connected tothe back surface of the template.
 49. The method according to claim 39,wherein while the template is being separated from the imprint materialpattern, the pressure applied to the back surface of the template ischanged depending on a separation speed of the template.
 50. The methodaccording to claim 39, wherein the pressure applied to the back surfaceof the template is increased when the separation speed exceeds or equalsto a first value and is reduced when the force is below or equal to asecond value.
 51. The method according to claim 49, wherein theseparation speed is measured by irradiating the template and thesubstrate with a laser beam.
 52. The method according to claim 39,wherein the result of the observation includes a measurement of a sizeof the separated area or a size of the non-separated area.
 53. Themethod according to claim 39, wherein template is bent while thetemplate is being separated.